18" Sputter Vacuum Chamber - Stainless Steel

Approximate internal dimensions: 14” (high) x 18” (wide) x 18” (deep).

304 stainless steel construction.

Full width opening door.

Hinged left side.

(1) 4.0” diameter viewport penetration.

The following chamber penetrations are provided:

Baseplate:

(1) ISO160 port (center).

(4) 1.015” diameter penetrations (front).

(6) 0.515” diameter penetrations (sides & rear).

(9) M6 Blind tapped mounting holes.

Sidewall:

(4) 2.75” CF flanges.

(1) ISO 160 port.

Top-plate:

(3) ISO160 ports.